Issue 15

K. V 26 In in dur ref pla five sam For wit for R E wa neg Th coe Bas the par A h me sur Ap spe act sam tem T ogel et alii, Fra addition to th the introduct ation of the erence specim sma (N 2 -plas minutes. Th ples vary be specimens w hout any pla oxygen plasm SULTS he varia therefor By keep fers (Si-Si geo ligible variati e variation of fficients. So ed on the ge fracture tou ameters of th eat treatmen asured maxim faces of the w plying the sa cimens is hig ivated specim ples with an peratures. ttura ed Integrit e heat treatm ion, the surf plasma treat ens have n ma) have bee e annealing tween 1.38 N measured force [N] ith plasma a sma activatio a. tion of geom e to different ing the struc metry 2) ins on of Y(  ) c the wafer h the values of ometry, the m ghness can e manufactu t at higher t um force a afers, either me annealing her than the ens varies fo annealing à Strutturale, 15 ent, the infl ace activatio ment can als o plasma ac n taken into temperature and 4.26 N, 0.00 0 0 1 2 3 4 5 Figure 6 : F ctivation, th n. The maxim etries and bo fracture tou ture height h tead of a sam an be observ eight leads to Y(  ) decreas inima of the be determin ring process. emperatures nd the fractu in oxygen or temperature one of sam r different a temperature (2011) 21-28; uence of the n can be car o vary. Thre tivation. Mo account. The of 100 °C w Fig. 6. .02 0.04 applie orce displacem e measured m um forces nd paramete ghness. S constant, a ple consistin ed, Fig. 7 . a significant e with increa stress inten ed. Using th Smaller frac leads to hig re toughnes nitrogen pla , the maxim ples with any nnealing tem of 40 °C is DOI : 10.3221/IG pre-treatmen ried out usin e different p reover, plasm duration for as the same 0.06 d displaceme ent curves fo aximum for for samples a rs leads to di nd changing g of an unstr deviation be sing wafer he sity coefficien e same geo ture toughne her maximum s of the spec sma, before b um force an other pre-t peratures. Fu much highe F-ESIS.15.03 t has to be c g different re-treatments a activation the plasma t for all three s 0.08 0 nt [mm] r different pre ces are appro ctivated in n fferent functi the position uctured and tween the fu ight. t and the ma metries the sses can be o forces and imens can b onding, Fig. d therefore t reatment. Th rthermore, t r than the o haracterised plasmas and are compar s in oxygen reatment for tacks, too. T .10 0.12 reference oxygen plasm nitrogen plasm -treatments. ximately thr itrogen plasm ons for the s of the struc a structured c nctions and ximum force fracture toug bserved for l also to high e significantl 8. he fracture to e deviation b he fracture t ne of non-a as well. As al different pro ed in the pre (O 2 -plasma) the activated he maximum a a ee times high a are a little tress intensit ture by usin hip (Si-Si ge minima of th recorded du hness only ower anneali er fracture t y increased ughness of etween oxyg oughness of ctivated spec ready mentio cess gases. sent paper. and in nitro stacks was b forces of th er than the o bit smaller t y coefficient g two structu ometry 1), on e stress inten ring experim depends on ng temperatu oughnesses. by activating oxygen activ en and nitro plasma activ imens at hig ned The The gen oth ese nce han and red ly a sity ent, the res. The the ated gen ated her