On the preparation and characterization of thin NiTi shape memory alloy wires for MEMS

Riccardo Casati, Maurizio Vedani, Syed A. M. Tofail, Calum Dikinson, Ausonio Tuissi

Abstract


Shape memory alloy (SMA) wires are employed as actuators in small devices for consumerelectronics, valves and automotive applications. Because of the continued miniaturization of all the industrialproducts, nowadays the tendency is to produce MEMS (micro electromechanical systems). Among the mostpromising functional MEMS materials, the thin SMA wires that are offering a rapid actuating response withhigh power/weigh ratio of the material, are attracting a world wide interest. This paper is aimed at showing theproduction process and the characterizations of thin NiTi shape memory wires. The activity was focused ondrawing procedure and on functional and TEM characterizations of the final products. In particular, it wasevaluated the performance of the SMA wires for actuators in terms of functional fatigue and thermo-mechanicalproperties by means of an experimental apparatus design ad hoc for these specific tests

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DOI: http://dx.doi.org/10.3221%2FIGF-ESIS.23.01