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Author Details
Author Details
Hamada, S.
ICF12, Ottawa 2009
- MEMS, Metallic & Lightweight Alloys, Materials In A Space Environment
Strength Evaluation of Polycrystalline Silicon Structure Considering Sidewall Morphology
Abstract
PDF
ICF10, Honolulu (USA) 2001
- General Papers
Notch effect of micro polycrystalline silicon cantilever
Abstract
PDF
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