Digital Repository, ICF12, Ottawa 2009

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Multi-layer metallic composites as strong electrode structures for MEMS
D.F. Bahr, A. Bellou, N. Overman, H.M. Zbib

Last modified: 2013-05-07


If suspended membranes are to be used as support electrodes for piezoelectricfilms, they must be able to sustain large strains during operation. Metallicmultilayered films can have strengths in excess of 1 GPa, making them possiblesupport electrodes in piezoelectric micromechanical systems. In this study wecompare the mechanical testing methodologies and film performance for twoFCC-BCC multilayer film systems, Pt/Mo and Cu/Nb, as well as one tri-layer filmof Cu/Nb/Ni.

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