Issue 29

V. Zega et alii, Frattura ed Integrità Strutturale, 29 (2014) 334-342; DOI: 10.3221/IGF-ESIS.29.29 342 C ONCLUSION n the present work, an innovative resonant four-axis inertial sensor has been designed, modelled and fabricated. Analytical and numerical finite elements simulations have been used during the design phase for the evaluation of the device performances and for the maximization of its sensitivity. The resulting structure has only two inertial masses and, despite its extremely reduced dimensions, enables differential detection of two different angular velocities and of two different linear acceleration components. Resonant detection is used for the four axis, with two different kind of resonators respectively oscillating in bending and in torsion. The differential reading enables detection of the external quantities even in the presence of eigenstresses due e.g. to temperature variations. Moreover, the differential reading increases the range of linearity and the sensitivity of the proposed inertial sensor. R EFERENCES [1] Senturia, S.D., Microsystem design, Kluwer Academy, Dordrecht (2002). [2] Gardner, J.W., Varadan, V.K., Awadelkarim, O.O., Microsensors MEMS and smart devices, Wiley, Chichester (2001). [3] Ayazi, F., Multi-DOF inertial MEMS: From gaming to dead reckoning, Proc. 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, (2011) 2805-2808. [4] Watanabe, Y., Mitsui, T., Mineta, T., Kobayashi, S., Taniguchi, N., Okada, K., Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining, Sens. Actuator A, 97-98 (2002) 109-115. [5] Xie, Z., Chang, H., Yang, Y., Li, X., Zhou, P., Yuan, W., Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer, In: Proc. of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), (2012) 551-554. [6] Corigliano, A., Masi, B.D., Frangi, A., Comi, C., Villa, A. and Marchi, M., Mechanical characterization of polysilicon through on chip tensile tests, J. Microelectromech. Syst., 13 (2004) 200-219. [7] Zhu, R., Zhang, G., Chen, G., A novel resonant accelerometer based on nanoelectromechanical oscillator, In: Proc. MEMS 2010, Hong Kong, (2010) 440-443. [8] Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B., A resonant micro-accelerometer with high sensitivity operating in an oscillating circuit, J. Microelectromech. Syst., 19 (2010) 1140 – 1152. [9] Kim, H.C., Seok, S., Kim, I., Choi, S-D. , Chun, K., Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs), In: Proc. Transducers05, Seoul, (2005) 172-175. [10] Comi, C., Corigliano, A., Ghisi, A., Zerbini, S., A resonant micro accelerometer based on electrostatic stiffness variation, Meccanica, 48 (2013) 1893–1900. [11] Seshia, A.A., Howe, R.T., Montague, S., An integrated microelectromechanical resonant output gyroscope, In: Proc. MEMS2002, (2002) 722-726. [12] Li, J., Fang, J., Dong, H., Tao, Y., Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope, Microsyst. Technology, 16, 4 (2010) 543- 552. [13] Comi, C., On geometrical effects in micro-resonators, Latin American J. Solid and Structures, 6 (2009) 73-87. [14] Ferrari, V., Ghisla, A., Marioli, D., Taroni, A., Silicon resonant accelerometer with electronic compensation of input- output cross-talk, Sens. Actuator A, Phys., 123-124 (2005) 258-266. [15] Stokey, W., Vibration of systems having distributed mass and elasticity. Shock and Vibration Handbook, C. Harris, Ed. New York: McGrawHill, 1988. [16] Bokaian, A., Natural frequencies of beams under tensile axial load, J.Sound Vib., 142 (1990) 481–498. [17] Tocchio, A., Comi, C., Langfelder, G., Corigliano, A., Longoni A., Enhancing the Linear Range of MEMS Resonators for Sensing Applications, IEEE Sensors Journal, 11(12) (2011) 3202-3210. [18] Caspani, A., Comi, C., Corigliano, A., Langfelder, G., Zega, V., Zerbini, S., Dynamic Non-Linear Behaviour of torsional resonators in MEMS, in preparation. I