Font Size: 

If suspended membranes are to be used as support electrodes for piezoelectricfilms, they must be able to sustain large strains during operation. Metallicmultilayered films can have strengths in excess of 1 GPa, making them possiblesupport electrodes in piezoelectric micromechanical systems. In this study wecompare the mechanical testing methodologies and film performance for twoFCC-BCC multilayer film systems, Pt/Mo and Cu/Nb, as well as one tri-layer filmof Cu/Nb/Ni.